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Shock and Vibration
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2024
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Article
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Tab 2
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Research Article
Nonlinear Displacement of the Electrothermal V-Shaped Actuator
Table 2
Material parameters of silicon.
d
(kg/m
3
)
E
(GPa)
(W/m·K)
(J/kg·K)
(Ω·m)
λ
(1/K)
2330
169
0.0257
712
148 × 10
−6
1.25 × 10
−3